ICCHIP EquipmentWafer & front-end tools Request a quote

Wafer & chip tools

Wafers
on process.

CZ furnaces, lithography, PVD, lapping and plasma etch for front-end chip work. Quoted against wafer diameter and process node.

7catalogue machines
1 dayquote response

Catalogue

CHIP Equipment

CZ furnaces, lithography, PVD, lapping and plasma etch for front-end chip work. Quoted against wafer diameter and process node.

Single Crystal Pulling Furnace CZCHIP

Single Crystal Pulling Furnace (CZ)

Czochralski furnace growing monocrystalline silicon ingots for wafer starting material.

  • CZ pull, 6–12 in class
  • Argon / vacuum chamber
  • Diameter and resistivity on request
Front-end wafer fabrication equipmentCHIP

Front-End Wafer Fabrication Set

Grouped core tools for front-end wafer lines: clean handling, process modules and metrology interfaces.

  • 150 / 200 / 300 mm
  • Front-end process modules
  • Quoted as a line package
Physical Vapor Deposition SputterCHIP

Physical Vapor Deposition (Sputter)

Magnetron sputter tool depositing metal and barrier films on wafers.

  • Al / Cu / Ti / TiN
  • Single or cluster PVD
  • Wafer 150–300 mm
Silicon Ingot Wire SawCHIP

Silicon Ingot Wire Saw

Multi-wire saw slicing CZ ingots into wafers with controlled thickness and TTV.

  • Multi-wire slurry / diamond
  • Ingot 6–12 in
  • TTV / warp control
Wafer Lapping and Polishing MachineCHIP

Wafer Lapping & Polishing Machine

Double-side lapping and CMP-style polish to bring sliced wafers to spec thickness and roughness.

  • Lapping + polish
  • 150 / 200 / 300 mm
  • Ra / TTV to drawing
Lithography Scanner DUV EUV StepperCHIP

Lithography Scanner / DUV·EUV Stepper

Stepper / scanner exposing wafer resist with DUV or EUV optics for critical layers.

  • DUV / EUV class
  • Overlay to process node
  • 200 / 300 mm wafers
Dry Plasma EtcherCHIP

Dry Plasma Etcher

Dry plasma etch for dielectric and metal layers with anisotropic profiles.

  • RIE / ICP plasma
  • Oxide / poly / metal
  • Single-wafer chamber

Capabilities

Wafer / chip tools

01

Crystal & slice

CZ, wire saw and polish quoted to ingot and wafer diameter.

02

Front-end modules

Lithography, PVD and plasma etch to process node.

03

FAT & manuals

Factory acceptance and English operating files.

04

Export packing

Crate packing for precision tools.

Facility

Front-end tool bays

Wafer tools prepared for FAT.

01Production
Quoted to specification

Send drawings or process windows. The team replies within one business day.

02Process bay

Quality

Shipped with the process file

Utility drawings and FAT records travel with the tool.

  • Factory records on request
  • Export packing
  • English documentation

HANDOVER

01Specification checkAgainst drawing or process window
02Packing listLot and serial numbers

Request a quotation

Send your wafer process specification.

Wafer diameter, node and destination. Reply within one business day.

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